ITS | ION Technology Solutions | Aftermarket Replacement Components for Semiconductor Process and Metrology Tools
  REPLACEMENT COMPONENTS AND PARTS FOR SEMICONDUCTOR ION IMPLANT PROCESS TOOLS

PRODUCT INDEX

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ION Technology Solution's Component and Assembly Drawing Catalog ( password-proteced PDF, 55MB; may take a number of minutes to download) is formatted in such a way as to make it as interactive and simple to use as is possible. This catalog is not yet inclusive of the over 600 individual components that ITS has to offer.

iTS Replacement Parts for Axcelis/Eaton Implanters, indicating individual components

Components Index Table
(Clicking on an item will launch a PDF document in a new window)
  Description  
Axcelis Machine Model Reference
ITS # Source Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74028-0 Non Vaporizer, Tungsten Configuration 11004940
•
A74028-1 Non Vaporizer, Molybdenum Configuration N/A
•
A74029-0 Non Vaporizer, Tungsten Configuration N/A
•
A74029-1 Non Vaporizer, Molybdenum Configuration N/A
•
A74030-0 Non Vaporizer, Tungsten Configuration N/A
•
A74030-1 Non Vaporizer, Molybdenum Configuration N/A
•
A74104-0 Vaporizer, Tungsten Configuration N/A
•
A74104-1 Vaporizer, Molybdenum Configuration N/A
•
A74105-0 Vaporizer, Tungsten Configuration N/A
•
A74105-1 Vaporizer, Molybdenum Configuration N/A
•
A74106-0 Vaporizer, Tungsten Configuration N/A
•
A74106-1 Vaporizer, Molybdenum Configuration N/A
•
A74143-1 Vaporizer, Molybdenum Configuration 7184-0024-0001
•
A74144-1 Non Vaporizer, Molybdenum Configuration N/A
•
A74034-0 Non Vaporizer, Tungsten Configuration Lined N/A
•
•
A74034-1 Non Vaporizer, Molybdenum Configuration Lined N/A
•
•
               
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ITS # Lined Arc Chamber Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74132-0 Non Vaporizer, Tungsten Configuration N/A
•
•
•
A74132-1 Non Vaporizer, Molybdenum Configuration N/A
•
•
•
A74133-0 Vaporizer, Tungsten Configuration N/A
•
•
•
A74133-1 Vaporizer, Molybdenum Configuration N/A
•
•
•
A74141-0 Non Vaporizer, Tungsten Configuration N/A
•
A74141-1 Non Vaporizer, Molybdenum Configuration N/A
•
A74140-0 Vaporizer, Tungsten Configuration N/A
•
A74140-1 Vaporizer, Molybdenum Configuration N/A
•
               
ITS # Source Housing Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74019 Source Housing & Beam Defining Plate, E2 N/A
•
A74031 Source Housing & Beam Defining Plate, E N/A
•
A74166-0 Source Housing Components  
•
•
A74173-0 Source Housing / Beam Defining Plate Components  
•
A74185 Source Housing Components  
•
               
ITS # Extraction Electrode Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74008 Assembly Version 34 1181634
•
•
A74022 Assembly Version 33 1181633
•
•
A74121 Extration Electrode, NV-8250 N/A
•
A74125 Center High Energy Electrode He Special 1186131
•
A74127 Extration Electrode 1.5m HE 1186230
•
A74129 Dual Slit Electrode N/A
•
•
A74188 Extraction Electrode  
•
A74200-1 Ultra EE Assy, Block 5 with alternate design, Block 5  
•
               
ITS # 70-Degree Analyzer Magnet Pump Extension Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74110 70 Degree Analyzer Magnet Pump Extension 11004770
•
A74111 70 Degree Analyzer Magnet 11005400/ 11005401
•
•
A74113 70 Degree Analyzer Magnet N/A
•
A74176 70 Degree Analyzer Magnet Components  
•
               
  Beam Guide Components              
A74191 Beam Guide Components, Block 1  
•
•
A74194 Beam Guide Components, Block 2  
•
A74197 Beam Guide Components, Blocks 3,4, & 5  
•
               
ITS # Resolving Housing Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74112-0 Slit Quadrupole 1182061
•
A74116 Post Accel, Electrode Assy., Resolving Housing N/A
•
A74118-0 Resolving Housing N/A
•
A74149 Post Accel, Electrode Assy., Resolving Housing N/A
•
A74117 ELECTROSTATIC QUADRAPOLE (Short) N/A
•
A74119 ELECTROSTATIC QUADRAPOLE (Long) N/A
•
               
ITS # Faraday Flag Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74114 Flag Faraday 1181831/33/or 38
•
•
A74115 Flag Faraday/ Selectable Aperture 11002510
•
A74158-0 Flag Faraday Components  
•
A74162-0 Variable Resolving Aperature Assy  
•
A74164 Flag Faraday Components  
 
•
A74170-0 Variable Resolving Aperture Components  
•
               
ITS # Electromagnetic Reflector Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74146 Electromagnetic Reflector 1190500
•
               
ITS # Electron Shower Assemblies Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74024 E-Shower Assembly 1198250
•
A74103 Forward Bias E-Shower Assembly 1183280
•
A74005 Plasma Shower 11013880
•
•
A74150-0 PEF-Xe N/A
•
•
     
ITS # Beam Tunnel Assemblies              
A74156-0 Beam Tunnel Components  
•
•
               
ITS # Disk Faraday Assembly Axcelis Assembly
Reference #
GSD
200E
GSD
200E2
GSD
HE
GSD
ULTRA
GSD
LEDIII
NV8250
A74148 Disk Faraday 1199240
•
•
•
A74160-0 Triple Surface Disk Faraday Components  
•
•
               
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