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OEM Substitute Parts for AMAT Implanters

iTS offers a wide range of parts that provide enhanced performance of the Ion Beam Line. We offer Tungsten, Molybdenum, Tantalum, Stainless Steel, Aluminum, Brass, Copper, and Graphite Components. Below are the Axcelis Implanters and Assemblies that we support:

  • AMAT 9500

  • AMAT QX

  • AMAT QX-Plus

 Implanters Supported

Assemblies Supported

  • Extraction Electrode

  • Miscellaneous 

  • Source

iTS is not the Original Equipment Manufacturer (OEM) for any of the Implanters for which it supplies parts. iTS does not produce its products in conjunction with OEMs. iTS designs and produces its own parts and assemblies using its own design and intellectual property.

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