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iTS Enhancements for AMAT Implanters

iTS has developed some improvements for AMAT Implanters. Our improvements increase Implanter Uptime, and reduce Cost of Consumables, Gas Consumption, and Maintenance Time. These improvements are created based on customer requests.
Below is the list of AMAT Implanters and assemblies that we support.

Implanters Supported

  • Electrode

  • Source

  • AMAT 9500


  • AMAT QX-Plus

Upgraded Assemblies

iTS is not the Original Equipment Manufacturer (OEM) for any of the Implanters for which it supplies parts. iTS does not produce its products in conjunction with OEMs. iTS designs and produces its own parts and assemblies using its own design and intellectual property.

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