top of page

OEM Substitute Parts for Axcelis Implanters

iTS offers a full range of parts that provide enhanced performance of the Ion Beam Line. We offer Tungsten, Molybdenum, Tantalum, Stainless Steel, Aluminum, Brass, Copper, and Graphite Components. Below are the Axcelis Implanters and Assemblies that we support:
  • Axcelis GSD 200

  • Axcelis GSD 200E

  • Axcelis GSD 200EE

  • Axcelis GSD NV-10

  • Axcelis GSD NV-6200/6250

  • Axcelis GSD NV-8200/8250

  • Axcelis GSD HE

  • Axcelis GSD VHE

  • Axcelis HC3

  • Axcelis Ultra

Implanters Supported

Assemblies Supported

  • Analyzer Magnet

  • Disk Faraday

  • Electromagnetic Reflector

  • Electron Shower

  • Extraction Electrode

  • Flag Faraday

  • High Voltage Bushing

  • Plasma Shower

  • Resolving Housing

  • Source

  • Source Flange and Liner

  • Source Housing

iTS is not the Original Equipment Manufacturer (OEM) for any of the Implanters for which it supplies parts. iTS does not produce its products in conjunction with OEMs. iTS designs and produces its own parts and assemblies using its own design and intellectual property.

bottom of page