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iTS Enhancements for Axcelis Implanters

iTS has developed many improvements for Axcelis Implanters. Our improvements increase Implanter Uptime and reduce Cost of Consumables, Gas Consumption, and Maintenance Time. These improvements are created based on customer requests.
Below is the list of Axcelis Implanters and assemblies that we support.

Implanters Supported

  • Analyzer Magnet

  • EMER

  • Extraction Electrode

  • Flag Faraday

  • High Voltage Bushing

  • Source

  • Source Flange and Liner

  • Axcelis GSD 200

  • Axcelis GSD 200E

  • Axcelis GSD 200EE

  • Axcelis GSD HE

  • Axcelis GSD VHE

  • Axcelis GSD NV-8250

  • Axcelis HC3

  • Axcelis Ultra

Upgraded Assemblies

iTS is not the Original Equipment Manufacturer (OEM) for any of the Implanters for which it supplies parts. iTS does not produce its products in conjunction with OEMs. iTS designs and produces its own parts and assemblies using its own design and intellectual property.