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OEM Substitute Parts for Varian Implanters

iTS offers a wide range of parts that provide enhanced performance of the Ion Beam Line. We offer Tungsten, Molybdenum, Tantalum, Stainless Steel, Aluminum, Brass, Copper, and Graphite Components. Below are the Axcelis Implanters and Assemblies that we support:

  • Varian E220/500

  • Varian E1000

  • Varian HC

  • Varian HCS/HCP

  • Varian Kestrel

  • Varian Viision 200

  • Varian Viista 80

  • Varian Viista 810

  • Varian Viista 900

  • Varian Viista 3000

Implanters Supported

Assemblies Supported

  • Analyzer Magnet

  • Extraction Electrode

  • Miscellaneous

  • Plasma Flood Gun

  • Resolving Aperture

  • Source

iTS is not the Original Equipment Manufacturer (OEM) for any of the Implanters for which it supplies parts. iTS does not produce its products in conjunction with OEMs. iTS designs and produces its own parts and assemblies using its own design and intellectual property.

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