About Us
Our Products

Ion Technology Solutions, located in Mineola, New York is a privately-owned engineering company that supplies proprietary solutions to the Semiconductor industry.

​Our products include:



We provide parts for Axcelis GSD 100, 200, 200E, 200EE, HE, VHE,
NV-8250, and Ultra/LED Implanters.


We provide parts for Varian Viision 200, Viista 80, Viista 810, Viista 900, Viista 3000, HCS/HCP, Kestrel and E220/500 Implanters.

Applied Materials

We provide parts for AMAT 9200, 9500, and QX Implanters.

Patents and Trademarks

iTS is a proud holder of nine U.S.​ patents for our proprietary Source and Electrode designs for the Ion Implantation process. These designs have been implemented with great success at multiple production facilities worldwide. 

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